Designs of Miniature Optomechanical Sensors for Measurements of Acceleration with Frequencies of Hundreds of Hertz

Some applications, such as aerospace testing and monitoring the operating conditions of equipment on space missions, require mechanical sensors capable of measuring accelerations at frequencies of several hundred hertz. For such measurements, optomechanical sensors can be used, providing the ability to measure accelerations without calibration. To enable such measurements, improved designs of drum-type sensors with the assigned performance have been elaborated. Such designs make it possible to provide the necessary levels of natural frequencies for optomechanical sensors and eliminate crosstalk. Using mathematical modeling, the dependencies of the mechanical characteristics of the proposed types of acceleration sensors versus their parameters were obtained. The use of such sensor designs ensures their compactness, making their manufacturing more technologically sound and suitable for use, in particular, in space missions.