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Femtosecond laser irradiation followed by chemical etching in NaOH is a material processing technique capable of creating hollow channels with submicrometric cross-sections, extending up to a millimeter in length. In this study, we unveil the fabrication conditions leading to an effective nano-structuring of bulk fused silica, overcoming the limitations of traditional machining techniques in terms of both minimum achievable dimensions and high aspect ratios.
Barbato et al. (Tue,) studied this question.