Two-Photon Lithography Parameter Study for Manufacturing of Acoustic Metamaterials on MEMS

Key Points

• Acoustic metamaterials were successfully manufactured using specific two-photon lithography parameters, resulting in improved characteristics.
• The study shows that optimal parameters can significantly enhance the manufacturing process, achieving finer control over the material properties.
• Utilizing a parameter study approach, researchers investigated variations in two-photon lithography during MEMS fabrication to improve acoustic properties.
• These findings highlight the potential for precise manufacturing of advanced materials in innovative applications.