Fourier ptychographic coherence scanning interferometry for 3D morphology of high aspect ratio and composite micro-trenches

Key Points

• The imaging method captures detailed 3D morphology of micro-trenches, highlighting its significance in high aspect ratios.
• Key evidence shows improved accuracy and resolution in 3D imaging compared to traditional methods.
• Observational analysis using coherence scanning interferometry allows for precise imaging of micro-structures.
• This approach may enhance design in micro-engineering fields, but further validation is needed.