Influence of Si Content on the Structural, Mechanical, Tribological, and Wettability Properties of Al-Si–N Thin Films

Key Points

• Enhanced tribological properties correlate with increased Si content in Al-Si–N thin films, indicating better wear resistance.
• Mechanical testing indicates significant improvements in strength and hardness as Si content rises in the thin films.
• Experimental analysis of wettability shows a clear relationship between Si content and surface energy characteristics in Al-Si–N films.
• Investigating structural properties offers insights into how Si influence affects the overall performance and durability in various applications.