ABSTRACT As a highly promising tool, femtosecond lasers are anticipated to become a powerful engine and support for the advancement of frontier science and advanced intelligent manufacturing technologies. This paper explores the fabrication techniques of femtosecond laser micro‐nano structures and their functional applications, unveiling the theoretical models and processing mechanisms of ultrafast laser machining, and detailing the extensive applications in surface modification, laser patterning, and two‐photon polymerization. In addressing the technical challenges of ultrafast lasers related to processing efficiency and accuracy, the footprints of femtosecond laser high‐efficiency precision manufacturing technologies were traced and investigated. Subsequently, the technological characteristics of holographic laser processing are elucidated, creating favorable conditions for the digitization and industrialization of femtosecond laser precision manufacturing with high flexibility, high quality, and high efficiency. The development trajectory and future prospects of holographic femtosecond laser beam shaping in two‐dimensional (2D) and three‐dimensional (3D) processing technologies are also summarized. The findings of this research will provide valuable insights and serve as a reference for forward‐looking and strategic innovation in advanced manufacturing fields such as aerospace, integrated circuits, information processing, and biomedicine.
Wang et al. (Thu,) studied this question.