This work focuses on the study of tribo-mechanical and microstructural properties of TiCN/ZrCN multilayer coatings with a modulation period of 12 nm, obtained by a conventional cathodic arc technique. The coatings were deposited at a temperature of 320 °C using nitrogen and methane reactive gases (N2/CH4) mixture in three different proportions. Surface morphology, composition, hardness, adhesion, friction and wear behavior were studied using atomic force microscopy, scanning electron microscopy with energy dispersive spectroscopy, X-ray diffraction, Raman spectroscopy, nanoindentation, and scratch and wear tests. The analysis of the coating composition revealed a strict dependence of the carbon content on the CH4 flow rate. It was found that the coatings with a carbon content of 14.6 at.% and 15.9 at.% consist of crystalline TiZr (C,N) with the presence of amorphous carbon. All the studied TiCN/ZrCN coatings showed improved tribo-mechanical properties compared to TiN/ZrN multilayers obtained under the same deposition conditions. The highest hardness of 40 GPa was obtained for the coating deposited at a N2/CH4 flow rate of 370/100 sccm. The lowest wear rate of 3.16 × 10−6 mm3/N·m under dry sliding conditions was observed in the multilayer coatings deposited at the N2/CH4 flow rates of 330/140 sccm.
Cholakova et al. (Thu,) studied this question.