In-situ tools, sample designs and protocols (D3.2)

Key Points

• The study aims to establish and validate a new in-situ setup for thermal cycling of copper on silicon samples.
• Developed a set-up for thermal cycling using polyheater samples.
• Imaged a sample with x-ray transmission imaging to validate setup functionality.
• Designed new sample layouts for 3D imaging at Infineon Technologies Austria and KAI.
• The new in-situ setup for thermal cycling was successfully established.
• An exemplary sample was validated through x-ray transmission imaging.
• Production delays prevented the imaging of new 3D sample layouts.