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Thermal images of active semiconductor devices are acquired and processed in real time using visible light thermoreflectance imaging with 34mK sensitivity. By using a 16×16 alternating current coupled photodiode array with synchronous frequency domain filtering a dynamic range of 123dB is achieved for 1s averaging. Thus with a stable and higher power light source, fundamentally the camera can reach 6mK sensitivity over a submicron area. The number of pixels in the image is increased to 160×160 by multiple frame image enhancement and submicron spatial resolution is achieved. The photodiode array system has a maximum 40kHz frame rate and generates a synchronous trigger for recovery of the phase signal. Amplitude and phase images of the thermoreflectance signal for 50×50 micron square active SiGe based microcoolers are presented.
Christofferson et al. (Fri,) studied this question.