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A 0.12 μm aperture in a metal film supported by a glass slide is used to define a submicroscopic source of light for a demonstration of scanning ultramicroscopy in the reflection mode. The aperture is viewed through a microscope in dark field illumination by a totally reflected beam (λ=633 nm). When an interface is brought in proximity to the aperture, the light emission from the aperture is quenched to an extent which depends on the nature of the interface and the polarization of the incident beam. With a 1 μm wide hole in a thin dielectric or metal film as test object, an edge resolution of 0.1 μm is obtained only with scans perpendicular to the direction of the irradiating beam.
Ulrich Fischer (Tue,) studied this question.