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Abstract Titanium dioxide (TiO 2 ) nanoscaffold thin films consisting of interconnected 3D TiO 2 nano‐structures with an ordered pore network are fabricated by anodization of titanium nitride (TiN) blanket layers in fluoride‐less aqueous electrolytes. The cross‐section of the nanoscaffold films resemble a layered TiO 2 structure supported by 2 nm wide vertical interconnections. The formation and subsequent release of N 2 gas from the oxidation of N 3− facilitates the formation of the ordered network of 2–10 nm wide pores, while the oxidation of Ti 3+ creates the mesh‐like TiO 2 structures around them. The TiO 2 interconnections give good electronic conductivity, and the connected pores allow access of the active sites in amorphous TiO 2 by electrolytes, resulting in a volumetric surface area enhancement of 540x per micron thickness of the film. The films exhibit high charge retention capacity in nonaqueous and even in aqueous electrolytes for a multitude of ions, as demonstrated during electron‐coupled ion‐insertion reactions for Li + , Na + , K +, and Mg 2+ . The controlled and targeted growth of the oxide during anodization can further facilitate the formation of patterned structures on masked TiN substrates, making the material attractive for numerous electrochemical applications.
Khurana et al. (Thu,) studied this question.