ABSTRACT Beam scanning systems play a pivotal role in modern 3D sensing technologies. However, commercial systems are often limited in frame rates, resolution, and scanning field of view (FoV) due to inherent constrains in both mechanical and solid‐state deflection mechanisms. Here, we implement a semi‐solid‐state beam scanning system that integrates a microlens array and a liquid‐crystal quadratic phase lens with a micro‐actuator. By segmenting the scanning region, the system achieves high‐speed beam scanning. Moreover, the quadratic phase lens provides a wide FOV, with simulations indicating coverage exceeding 178°. Experimental results demonstrate high‐precision 3D reconstruction over a 45°FoV, with an average lateral error below 1.01%. Adjusting the actuator vibration amplitude enables control of the resolution, allowing adaptation to diverse operational scenarios. This performant and high‐stability system offers considerable potential for applications such as LiDAR, robotic vision, and so on.
Liao et al. (Sat,) studied this question.