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Inspection is an essential part in semiconductor manufacturing process. Although high inspection rate can ensure early detection of inline abnormality, but still it is strictly controlled due to tight production plan and limitation of inspection tool capacity. Thus, an optimized sampling solution is needed to manage the situation. The proposed solution must be able to comprehensively monitor production equipment status and dynamically adjust the lot sampling plan with high accuracy and ultimate efficiency. To fulfill the requirement, based on smart sampling system proposed in 2010 1, the work here introduced the concept of sampling threshold to determine the lots to be sampled with better robustness. The simulation result shows that under same sampling rate, the sampling plan controlled by sampling threshold can maintain the production system overall risk at lower level than systematic sampling.
Lai et al. (Sun,) studied this question.