Broad band on-chip Ti-based RF terminator for high-speed photonic platforms

In this paper, we demonstrate a compact broadband on-chip radio-frequency (RF) termination based on pure titanium thin-film resistors integrated into coplanar waveguide (CPW) structures. The terminated transmission lines exhibit good impedance matching, with simulated reflection coefficients below −20 dB over 100 GHz bandwidth and experimentally measured reflections below −10 dB up to 65 GHz. Additional measurements evaluate the stability and power-handling behavior of the Ti resistors. The results show that thin-film titanium can operate as an effective on-chip RF termination in integrated CPW structures, maintaining stable RF performance over repeated measurements. Such terminations are relevant for high-speed photonic platforms where compact integration and reduced packaging complexity are desirable, including dense modulator architectures.