How to obtain and use X‐Ray projection microscopy in the SEM

Abstract The primary electron beam of an SEM is used to generate a point source of x‐rays, permitting x‐ray microscopy within the SEM. The practical device described fits into the sample chamber of an SEM. Exact and reproducible adjustabilities of the sample support and the film holder allow two x‐ray micrographs, e.g. stereo‐micrographs, to be taken in one run without repressurization of the specimen chamber. By comparing x‐ray and SEM micrographs of the same sample in the identical position it is possible to get additional information concerning surface morphology and inner structure of a specimen.