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This paper presents a new algorithm for the calibration of nearfield scanning microwave microscopes. By adopting techniques known from vector network analyzer calibration, a nearfield scanning microwave microscope can be calibrated at a specific microwave frequency with three standards. The advantages compared to existing calibration methods are that the calibration is valid for all possible samples and that the measurements require less time than other algorithms.
Hoffmann et al. (Wed,) studied this question.