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Microscopic fringe projection method based on fringe projection and microscopic imaging was proposed to measure the 3D profile of micro-components, which is fast, accurate and non-contact. The measurement system includes two sets of microscope tubes: one for projecting fringe, and the other for imaging. The sinusoidal fringes generated by the software were projected onto the tested object through the DLP projector. The deformed fringes were captured by the CCD camera. The five-step phase shifting method was used for the phase extraction, and the branch cut algorithm was applied for the phase unwrapping process. After system calibration, a coin was measured to show the applicability of the system.
Chen et al. (Thu,) studied this question.