Fundamental-mode VHF/UHF minature acoustic resonators and filters on silicon

Novel bulk acoustic-wave high-Q resonators and acoustically coupled resonator filters have been fabricated and operated at their fundamental half-wavelength mode in the 200-500-MHz frequency range. These structures are fabricated on thin ZnO/silicon diaphragms with dimensions small enough to be incorporated within integrated circuits. Resonator Q’s near 2600 at the fundamental mode have been obtained and strong inter-resonator acoustic coupling has been achieved yielding filters having insertion loss (untuned) as low as 5.5 dB.