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Vertical cavity surface emitting lasers (VCSELs) have been successfully integrated by fluidic self-assembly (FSA) into 10 µm deep holes etched into an Si substrate. These 40 × 40 × 10 µm3 devices were fully planarised and metallised after integration. The VCSELs operated pulsed at 0.98 µm with a threshold current as low as 75 mA and a turn-on voltage of 2.9 V.
Tu et al. (Thu,) studied this question.