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Abstract A new type of linear motor using a multilayered piezoelectric actuator has been developed in which a mechanically resonating part slides on a stationary rail. The slider consists of a multilayered piezoelectric actuator and an elastic vibratory fork bonded together. The key to obtaining a smooth movement is to realize a slight shift in the resonance frequency of each leg of the fork so that the moving direction can be controlled by changing the drive frequency.
Uchino et al. (Tue,) studied this question.