Templated Solid‐State Dewetting to Controllably Produce Complex Patterns

Templated formation of complex patterns via solid-state dewetting is demonstrated. Thin films often dewet from their substrates when they are heated, even while remaining in the solid state throughout the process. It is shown that solid-state dewetting of epitaxial films can be templated through lithographic pre-patterning, so as to reproducibly form complex structures with sub lithographic feature sizes. Detailed facts of importance to specialist readers are published as ”Supporting Information”. Such documents are peer-reviewed, but not copy-edited or typeset. They are made available as submitted by the authors. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.