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We report a study of a gallium phosphide, hemispherical, solid immersion lens through the imaging of 40-nm-diam fluorescent dye balls. A spatial resolution as small as 139 nm has been achieved at a wavelength of 560 nm, which is equivalent to a diffraction-limited system of numerical aperture 2.0. This resolution is a 33% improvement over conventional oil immersion objectives and previously reported solid immersion lenses, which typically have a numerical aperture around 1.5.
Wu et al. (1999) studied this question.