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This study reports an improved approach to implement a carbon nanotube (CNT)-based flexible tactile sensor, which is integrated with a flexible print circuit (FPC) connector and is capable of detecting normal and shear forces. The merits of the presented tactile sensor by the integration process are as follows: (1) 3D polymer tactile bump structures are naturally formed by the use of an anisotropically etched silicon mold; (2) planar and 3D distributed CNTs are adopted as piezoresistive sensing elements to enable the detection of shear and normal forces; (3) the processes of patterning CNTs and metal routing can be easily batch fabricated on rigid silicon instead of flexible polymer; (4) robust electrical routing is realized using parylene encapsulation to avoid delamination; (5) patterned CNTs, electrical routing and FPC connector are integrated and transferred to a polydimethylsiloxane (PDMS) substrate by a molding process. In application, the CNT-based flexible tactile sensor and its integration with the FPC connector are implemented. Preliminary tests show the feasibility of detecting both normal and shear forces using the presented flexible sensor.
Hu et al. (Fri,) studied this question.