High‐Speed Roll‐to‐Roll Nanoimprint Lithography on Flexible Plastic Substrates

Nanograting structures in either thermally or UV curable resist are continuously fabricated on a flexible plastic substrate by a high-speed roll-to-roll nanoimprint apparatus (see figure). As an example of the applications of such a roll-to-roll imprinting process, a high-performance metal wire-grid polarizer is demonstrated.