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Recent advances in the micromachining of poly(p-xylylenes), commercially known as Parylenes, have enabled the development of novel structures and devices for microelectromechanical systems (MEMS). In particular, Parylene C (polychloro-p-xylylene) has been explored extensively for biomedical applications of MEMS given its compatibility with micromachining processes, proven biocompatibility, and many advantageous properties including its chemical inertness, optical transparency, flexibility, and mechanical strength. Here we present a review of often used and recently developed micromachining process for Parylene C, as well as a high-level overview of state-of-the-art Parylene hybrid and free film devices for biomedical MEMS (bioMEMS) applications, including a discussion on its challenges and potential as a MEMS material. Copyright © 2015 John Wiley & Sons, Ltd.
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