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*† ‡ ‡ This paper presents the development of a micromachined piezoelectric microphone for aeroacoustic measurement applications. The microphone consists of a circular diaphragm of silicon possessing a thin annular ring of piezoelectric material deposited at the edge of the diaphragm. The microphone was designed by combining a linear piezoelectric composite plate model with a lumped-element, electroacoustic model. Experimental characterization indicates a
Horowitz et al. (Mon,) studied this question.
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