Recent advances in ultraviolet nanophotonics: from plasmonics and metamaterials to metasurfaces

Abstract Nanophotonic devices, composed of metals, dielectrics, or semiconductors, enable precise and high‐spatial‐resolution manipulation of electromagnetic waves by leveraging diverse light–matter interaction mechanisms at subwavelength length scales. Their compact size, light weight, versatile functionality and unprecedented performance are rapidly revolutionizing how optical devices and systems are constructed across the infrared, visible, and ultraviolet spectra. Here, we review recent advances and future opportunities of nanophotonic elements operating in the ultraviolet spectral region, which include plasmonic devices, optical metamaterials, and optical metasurfaces. We discuss their working principles, material platforms, fabrication, and characterization techniques, followed by representative device applications across various interdisciplinary areas such as imaging, sensing and spectroscopy. We conclude this review by elaborating on future opportunities and challenges for ultraviolet nanophotonic devices.