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January 30, 2023Applied Physics Letters

Thickness scaling down to 5 nm of ferroelectric ScAlN on CMOS compatible molybdenum grown by molecular beam epitaxy

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Authors

DWDing WangPWPing WangSMShubham Mondal

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Wang et al. (2023) studied this question.

synapsesocial.com/papers/6a0b6a13bc3a95fa09c30af0https://doi.org/10.1063/5.0136265
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