Key points are not available for this paper at this time.
We introduce an imaging system that can simultaneously record complete Mueller polarization responses for a set of wavelength channels in a single image capture. The division-of-focal-plane concept combines a multiplexed illumination scheme based on Fourier optics together with an integrated telescopic light-field imaging system. Polarization-resolved imaging is achieved using broadband nanostructured plasmonic polarizers as functional pinhole apertures. The recording of polarization and wavelength information on the image sensor is highly interpretable. We also develop a calibration approach based on a customized neural network architecture that can produce calibrated measurements in real-time. As a proof-of-concept demonstration, we use our calibrated system to accurately reconstruct a thin film thickness map from a four-inch wafer. We anticipate that our concept will have utility in metrology, machine vision, computational imaging, and optical computing platforms.
Building similarity graph...
Analyzing shared references across papers
Loading...
Tianxiang Dai
Thaibao Phan
Evan W. Wang
Microsystems & Nanoengineering
Stanford University
Samsung (South Korea)
Building similarity graph...
Analyzing shared references across papers
Loading...
Dai et al. (Sat,) studied this question.
www.synapsesocial.com/papers/6a16e56ef96f07bf256b6cd3 — DOI: https://doi.org/10.1038/s41378-023-00588-y