Experimental and theoretical aspects of the growth of vertically aligned CNTs by CCVD on AZO substrate

Abstract An efficient and reproducible growth of vertically aligned carbon nanotubes by CCVD requires accurate and specific setting of the synthesis parameters and the properties of catalyst thin layers. In this work, the growth of vertically aligned carbon nanotubes onto AZO (= aluminum doped zinc oxide) glass substrate covered by Al 2 O 3 and Fe-Co catalyst layer system is presented. Investigation of the effect of catalyst composition and synthesis temperature on CVD growth revealed the optimum condition of the synthesis. The analysis of as-prepared samples by SEM, TEM and Raman spectroscopy was carried out to prove the structure and quality of carbon deposit. Theoretical considerations have supported speculative ideas about the role of the support layer, the transformation of the catalyst layer in the presence of hydrogen gas and the growth mechanism of carbon nanotubes. The mechanism of CNT growth is modelled and the order of magnitude of experimentally observed vertical linear growth rate of CNT (several nm/s) is reproduced.