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This paper explores the integration of Artificial Intelligence (AI) in process control and diagnostics in semiconductor manufacturing. It highlights current trends, including machine learning (ML) for data alignment and predictive maintenance, and anticipates future advancements in data sharing and standardization. This overview showcases AI's transformative impact on equipment optimization and industry collaboration, underlining its role in shaping efficient, proactive manufacturing processes.
Jae-Yong Park (Sun,) studied this question.