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This paper presents a wide-bandwidth back-illuminated modified uni-traveling-carrier photodiode (MUTC-PD) packaged with standard WR-5 rectangular waveguide for high-speed wireless communications. With optimized epitaxy structure and coplanar waveguide electrodes, the fabricated 4-μm-diameter PD exhibits ultra-flat frequency response and high saturation power. Integrated passive circuits including low-loss bias-tee and E-plane probe are designed to package the PD into a compact module with waveguide output. The packaged PD module has demonstrated a flat frequency response with fluctuations within ±2.75 dB over a broadband of 140–220 GHz and a high saturated output power of −7.8 dBm (166 μW) at 140 GHz. For wireless communication applications, the packaged PD is used to implement 1-m free space transmission at carrier frequencies of 150.5 and 210.5 GHz, with transmission rates of 75 and 90 Gbps, respectively.
Tian et al. (Mon,) studied this question.
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