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This paper presents the design and fabrication of new types of polymer-based cantilevers for atomic force microscopy. The design and fabrication are aimed at the capability of 3D laser microprinting technology based on two-photon polymerization on a standard silicon substrate. IP-Dip commercial material from the Nanoscribe company was used for the fabrication of the designed cantilevers. The fabricated microprinted cantilevers facilitate precise manipulation at the nanoscopic scale, which is essential for studying nanomaterials’ mechanical, electrical, and optical properties. The cantilevers’ flexibility allows for the integration of functional elements such as piezoelectric layers and optical fibers, enabling combined measurements of multiple physical parameters. Various cantilever geometries, including rectangular and V-shaped, are examined, and their resonance frequencies are calculated. The experimental process involves preparing the cantilevers on a silicon substrate and coating them with aluminum for enhanced reflectivity and conductivity. Scanning electron microscope analysis documents the precise form of prepared polymer cantilevers. The functionality of the probes is validated by scanning a step-height standard grating. This study demonstrates the versatility and precision of the fabricated cantilevers, showcasing their potential for large-area scans, living cell investigation, and diverse nanotechnology applications.
Gašo et al. (Thu,) studied this question.