Impacts of post-deposition annealing on hole trap generation at SiO2/p-type GaN MOS interfaces

Abstract In this study, impacts of post-deposition annealing (PDA) on hole trap generation at SiO 2 /p-GaN MOS interfaces are investigated. While the surface potential is strongly pinned due to severe hole trapping after 800 °C PDA, successful hole accumulation is observed when PDA is performed at 200 °C. The density of interface hole traps causing surface potential pinning, extracted from the hump in capacitance–voltage curves, is about 10 12 cm –2 with 200 °C PDA, while over 10 13 cm –2 when the PDA temperature exceeds 600 °C, regardless of the annealing ambient. Consequently, the origin of these hole traps is speculated to be defects generated by thermal effects.