A Study on Improving the Heat Transfer Path of Semiconductor Equipment Using TRIZ

ChatGPT, with the advancement and commercialization of Chat GPT and AI, the industry related to high-performance graphics cards has experienced rapid growth, leading to a significant development in the high-capacity, high-performance memory semiconductor industry.As the related industries flourish, the demand for high-performance semiconductors is increasing.High-performance semiconductors must consume low power and operate at very high speeds.Companies require precise manufacturing processes that utilize very thin 10nm line widths to achieve small sizes and fast speeds while using low power for mass production.Such semiconductor manufacturing equipment requires high precision, as even tiny errors can result in defects.Precision in companies signifies technical prowess, and defects directly translate to losses.To prevent defects, semiconductor production equipment must maintain identical conditions, and any issues that arise during production must be addressed at their root cause to prevent defects from occurring.This study addresses the case of defects caused by overheating, a factor that is both beneficial and harmful in removing unnecessary residues (polymers) that occur during the Etch process, a crucial step in semiconductor fabrication.Heat transfer issues in semiconductor manufacturing processes have a significant impact on production efficiency and quality, necessitating effective approaches for improvement.To address the problem, Cause-Effect Chain Analysis (CECA) analysis, a method of cause-effect chain analysis based on TRIZ (Theory of Inventive Problem Solving), was used to identify the root cause of the issue, termed the critical temperature, using contradictions.Material simulation was then conducted by introducing a heat sink to validate the effectiveness of the proposed solution.Through this research, TRIZ has been demonstrated as a beneficial approach optimized for problem-solving in companies seeking to derive maximum effects with minimal costs, and it can serve as foundational material for future research.