High Throughput Manufacturing of Highly Ordered Mesoporous Thin Film Oxides for Hybrid-Polymer Nanocomposite Dielectrics

Highly ordered mesoporous metal oxide thin films have potential to become integrated into widely impactful dielectric materials due to the tunable properties of the oxide and its polymer filling; however, current manufacturing techniques to form the mesoporous oxide greatly limit scalable fabrication. Sol-gel mesoporous metal oxides generated via traditional processes require multi-day aging and high temperature, prolonged curing processes to yield controlled porosity at the expense of manufacturability. Moreover, high cost and unstable alkoxide precursors require precision over the solution precursor pH and subsequent thin film aging humidity after deposition. Solution combustion synthesis (SCS) is a next-generation method of generating metal oxides at reduced process temperatures (often <300 ºC) and using green precursors compared to the sol-gel approach. The metal oxide is typically produced from a metal nitrate, which provides both the metal cation and oxidant and an organic chelator fuel. The fuel acts to stabilize the cation against hydrolysis and to participate in the exothermic redox reaction that results in the metal oxide. Here, we present porogen integrated rapid oxidation (PIRO) which utilizes the principles of SCS to fabricate large-area mesoporous thin films of AlO x in less than 1 hour and at a temperature of 230 ºC. The PIRO method uses low-cost precursors to generate micelles with a controllable open-cell porosity ranging from ~30 – 60% and with varying degrees of closed-packed cubic ordering at a nearly 95% reduction in overall processing time. We show the precursor chemistry can be deposited via ultrasonic spray or blade coating at up to 6 m/min to manufacture large area mesoporous oxides and demonstrate filling of the porous AlOx with TOPAS® polymer to generate a hybrid nanocomposite with a dielectric constant of 6.26.