A high-performance microwave plasma source employing dielectric wedges

Abstract The microwave-to-plasma energy conversion efficiency and the ease of plasma self-ignition are critical factors affecting the applications for microwave plasma sources (MPSs). This study presents a novel MPS utilizing dielectric wedges for self-ignition and improved energy conversion. Firstly, we crafted a dielectric wedge with a gradient refractive index, guiding the electric field from air to dielectric materials and facilitating microwave propagation along the dielectric in a waveguide. Through electromagnetic simulation, we explored how the size and permittivity of the dielectric wedge affect the electric field distribution. Then, the MPS based on the dielectric wedge was designed. In this configuration, a dielectric tube encloses the discharge tube, connecting to dielectric wedges to guide electromagnetic waves to the plasma. We analyzed the MPS performance using the Drude model, evaluating microwave energy conversion efficiency across various electron densities and collision frequencies. The results were compared with a commonly used MPS based on a tapered waveguide, demonstrating the proposed MPS has wider applicability across different operation conditions. Finally, experiments under low pressures were conducted using various gases, showing an average energy conversion efficiency of approximately 40% higher than the tapered waveguide MPS. The experiments also indicate the proposed MPS has a greater capability of self-ignition at lower power levels. These findings highlight the efficacy of incorporating dielectric wedges to enhance MPS performance, making it conducive for broader industrial applications.