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Abstract A lens array is often used for optical components of sensing devices, requiring high surface quality and form accuracy. Fast tool servo (FTS)-based diamond turning is one of the technologies for manufacturing complicated shapes, such as freeform optics, structured surfaces, and microlens arrays, with high machining efficiency. In this study, lens array machining was performed on copper using an FTS on a diamond turning machine. For evaluating the lens array surface topography, the focus was on surface waviness formation. As a dominating factor of surface waviness, the system dynamics behavior was investigated by capturing and analyzing the position signal. It was found that a specific waviness pattern could be formed on the surface due to the servo response. By considering the dynamics of the FTS system from the captured signals, the FTS system behavior was identified, and optimal machining parameters for the lens array were proposed. A machining test under the optimized cutting conditions reduced the average Sdq used to quantify the waviness amount from 93 to 50 µrad and the standard deviation from 33 to 3 µrad, which greatly improved the consistency in accuracy for all lens arrays. This study will contribute to the appropriate utilization of FTS systems in the ultraprecision machining of various advanced optics, such as microlens arrays.
Hashimoto et al. (Mon,) studied this question.