Abstract Frog-leg robots are widely used for wafer-handling in semiconductor manufacturing. A typical frog-leg robot uses a magnetic coupler to achieve contactless transmission of motion between its driving motors, which operate at atmospheric pressure, and its end effector (blade) which operates within a vacuum chamber. However, the magnetic coupler is a low-stiffness transmission element that induces residual vibration during fast motions of the robot. Excessive residual vibration can cause collisions between the fragile wafer carried by the robot and cassette, hence damaging the wafer. While this problem could be solved by slowing down the robot, it comes at the cost of reduced productivity, which is undesirable. Therefore, this paper reports a preliminary investigation into input shaping (a popular vibration compensation technique) as a tool to reduce residual vibration of a frog-leg robot during high-speed motions. Two types of motions of the robot are considered: rotation and extension. A standard input shaper is shown to be very effective for mitigating residual vibration caused by rotational motion but is much less effective for extensional motion. The rationale is that the resonance frequencies of the robot are constant during rotation but they vary significantly during extension, hence reducing the effectiveness of standard input shaping. This necessitates the use of more advanced input shapers that can handle varying resonance frequencies to mitigate residual vibration during extensional motion in future work.
Lin et al. (Mon,) studied this question.