Investigationof an Electrically Driven Microelectromechanical System Resonator Under Mechanical Shock Effect with Quintic Nonlinearity

In a variety of applications, including signal processing, clock referencing, sensing, and others, microelectromechanical systems (MEMS) have been shown to be effective and broadly used. This study explores the dynamical response of a nonlinear MEMS resonator when subjected to a sudden mechanical shock under electrical excitation in the presence of quintic nonlinearity. The method of multiple scales (MMS) is utilized to construct the analytical formulas for analyzing the amplitude and phase response during primary resonance conditions. The analytical results are verified and compared with numerical simulations performed using the fourth-order Runge–Kutta method. Additionally, a parametric analysis is performed to examine the effect of different shock values on the resonator’s response and stability utilizing the Jacobian matrix. The agreement between analytical and numerical approaches proves MMS’s effectiveness in analyzing the shock impact on the MEMS resonator. The results provide valuable knowledge about the response and stability of MEMS resonators under mechanical shock, which is crucial for robust design in challenging conditions.