Broadband Antireflective Microstructures on Diamond Fabricated by Femtosecond Laser and Selective Wet Etching

Diamond antireflection techniques are of high interest for optical windows operating at extreme conditions. Herein, diamond antireflective microstructures in mid-infrared (MIR) spectral range were theoretically designed and experimentally fabricated. Finite difference time domain (FDTD) simulations were used to optimize the transmission performance of the diamond microstructures. Based on the simulation results, the optimized microstructures were fabricated by femtosecond (fs) laser direct writing (1030 nm, 300 fs, 25 kHz) followed by wet etching. After wet etching, the laser-modified zones and the accumulated graphitized clusters were effectively removed, thereby achieving the desired depth. The influences of laser power and scanning strategy on the morphology evolution of diamond microstructures were investigated. It was found that at the optimal conditions, the transmittance of the diamond increased from 70.9% to 81.4% (single-side) over a broad spectrum from 8 to 22 μm. This work demonstrates a promising hybrid fs laser/wet etching technique for diamond antireflective microstructures in MIR spectral range.