Abstract The continuous miniaturization of electronic systems has driven manufacturing into the ultra-precision regime, where dimensional tolerances fall below 10 nm, and surface quality approaches atomic smoothness. Conventional machining and lithography are inadequate to meet these demands, prompting the evolution of ultra-precision techniques combining deterministic material removal, atomic-scale deposition, and intelligent process control. This review surveys recent advances in mechanical, optical, chemical, and hybrid approaches for fabricating high-performance electronic, photonic, and quantum components with traceable, uncertainty-aware control across length scales. Developments in ultra-precision machining, laser ion beam processing, atomic-layer manufacturing, and additive–subtractive hybrids are highlighted alongside progress in in situ metrology and AI-based feedback control. The integration of explainable AI, digital twins, and adaptive learning is enabling unprecedented autonomy and repeatability in nanoscale production. Future directions emphasize sustainable, data-driven and quantum-level precision manufacturing to meet the requirements of next-generation semiconductors, photonics and quantum electronics. Attaining Precision-at-scale continues to remain a major grand challenge in the sector.
Verma et al. (Fri,) studied this question.