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Terahertz wave manipulations, especially the phase manipulations, through metasurfaces has attracted considerable interests. Here, we develop a terahertz beam steering device using the liquid-crystal (LC)-integrated programmable metasurface. Specifically, a reflective-type 1 bit metasurface element is designed by employing a multilayer structure composed of metallic back plate–LC–complementary split ring resonator (CSRR). Numerical simulations show that, at the optimized operation frequency of 0.675 THz, the developed metasurface element has a nearly 180° phase difference between unbiased and biased states with close reflection amplitudes. Furthermore, a one-dimensional programmable metasurface array with 32 independently controlled subarrays is designed and fabricated using the lithography technology. Both simulated and measured far-field scattering patterns of the metasurface certify the anomalous beam reflection and wide-angle beam steering performances. Nevertheless, the optimal frequency red shifts to 0.645 THz in the experiment. This work may advance the application of metasurfaces in terahertz beam manipulation devices.
Fu et al. (Wed,) studied this question.