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High-performance thin film lithium niobate (LN) electro-optic modulators with low cost are in demand. Based on photolithography and wet etching, we experimentally demonstrate a thin film LN Mach-Zehnder modulator with a 3 dB bandwidth exceeding 110 GHz, which shows the potential of boosting the throughput and reducing cost. The fabricated modulator also exhibits a comparable low half-wave voltage-length product of 2.37 V cm, a high extinction ratio of >23 dB, and the propagation loss of optical waveguides of 0.2 dB=cm. Besides, six-level pulse amplitude modulation up to 250 Gb=s is successfully achieved.
Yang et al. (Thu,) studied this question.
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