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An electric double-layer is generated near the open end of a high-density low pressure helicon sustained radio frequency (13.56 MHz) plasma source which expands into a diffusion chamber. Ion energy distribution functions measured with a retarding field energy analyzer placed in the diffusion chamber with its aperture facing the double-layer show the presence of a low energy peak (∼29 V) around the local plasma potential and a high energy peak (∼47 V) corresponding to a supersonic ion beam (∼2.1cs). At an axial distance 12 cm downstream of the double-layer, the beam density is 14% of the local density at that position and the ion energy gain is approximately 70% of the potential drop of the double-layer. The ion beam is observed from the center out to a radius corresponding to that of the plasma source tube (−6.8 cm⩽r⩽+6.8 cm) and is not greatly affected by the expanding magnetic field. A depression in the total ion flux just downstream of the double-layer—previously measured on the main z-axis of the reactor—is also present across the chamber diameter. Evidence of an electron beam near the closed end of the source tube, generated via “backwards” acceleration through the double-layer, has been observed on a Langmuir probe trace.
Charles et al. (Thu,) studied this question.