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Tunneling images of the ideal Si (111): H-11 surface exhibit features and electronic structure consistent with a simple termination of the surface dangling bonds by atomic hydrogen. Bombardment of the surface with low-energy (2--10 eV) electrons desorbs the hydrogen, converting the 11 surface phase to the 21 -bonded chain. The efficiency of this process versus electron kinetic energy indicates that the desorption is mediated by promoting electrons from the to the ^* band. The resultant increase in surface free energy drives a spontaneous phase transition to the 21. Individual 21 regions as small as ten surface sites have been created in this fashion.
Becker et al. (Mon,) studied this question.