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The fabrication and characterization of micromachined, piezoresistive, relative pressure sensors sandwiched between flexible polyimide layers is described. This work is motivated by the need to monitor force and pressure on nonplanar surfaces for structural health monitoring. 35-nm-thick nichrome (Ni-80%/Cr-20%) is used as a sensing material for the pressure sensor. The average value of the gauge factor of the nichrome was found to be 1.75.
Ahmed et al. (Sat,) studied this question.
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