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August 1, 1969Applied Physics Letters56 citations

75-GHz ACOUSTIC-SURFACE-WAVE TRANSDUCER FABRICATED BY AN ELECTRON BEAM

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ABA. N. BroersELE. G. LeanMHM. Hatzakis

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Abstract

Surface-acoustic-wave interdigital transducers operating at 1.75 GHz have been fabricated on y-cut z-oriented LiNbO3 and y-cut x-oriented quartz substrates by electron-beam techniques. The transducers consist of 25 pairs of interleaved aluminum ``fingers'' 0.3 μ wide and 0.7 μ apart. Used as a surface acoustic wave delay line, the insertion loss has been measured to be as low as 25 dB with a bandwidth of 70 MHz for 2.2-μsec delay. The parameters of the equivalent circuit of the transducer have been measured and agree with the theoretical calculation.

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Broers et al. (1969) studied this question.

synapsesocial.com/papers/6a6f1d67ce524a4339c3289chttps://doi.org/10.1063/1.1652923
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