Optimization of monolithic pixel sensors for high energy physics applications using 3D TCAD simulations

Abstract An extensive simulation effort was undertaken in the framework of the R&D of the CERN Experimental Physics department in collaboration with the ALICE experiment, to optimize the pixel sensor of the ITS3 vertex detector, a monolithic active pixel sensor (MAPS) developed for the ALICE experiment at CERN. Acting on the doping profiles, this set of simulations demonstrates the potential for substantial reduction in sensor capacitance and charge collection time. The optimization process developed specifically for the monolithic pixel sensor for ITS3 has also been applied to smaller pixel pitches and higher reverse sensor voltages to explore possible future applications.