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April 23, 2024IEEE Sensors Journal18 citations

Broadband Optomechanical Accelerometer Reaching the Thermomechanical Limit Based on Suspended Si3N4 Membrane Resonator

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WLWei LiWLWenyao LiuCLChenxi Liu

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Li et al. (2024) studied this question.

synapsesocial.com/papers/68e6de7cb6db64358765a9d8https://doi.org/10.1109/jsen.2024.3390200
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